JPH04126147U - 微粒子検出装置用の多点入力切換機構 - Google Patents
微粒子検出装置用の多点入力切換機構Info
- Publication number
- JPH04126147U JPH04126147U JP2936092U JP2936092U JPH04126147U JP H04126147 U JPH04126147 U JP H04126147U JP 2936092 U JP2936092 U JP 2936092U JP 2936092 U JP2936092 U JP 2936092U JP H04126147 U JPH04126147 U JP H04126147U
- Authority
- JP
- Japan
- Prior art keywords
- solenoid valve
- dust
- switching mechanism
- input switching
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 35
- 239000002245 particle Substances 0.000 title abstract description 7
- 239000000428 dust Substances 0.000 claims abstract description 34
- 238000005259 measurement Methods 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 7
- 239000007788 liquid Substances 0.000 abstract description 16
- 238000005070 sampling Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2936092U JPH04126147U (ja) | 1992-04-07 | 1992-04-07 | 微粒子検出装置用の多点入力切換機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2936092U JPH04126147U (ja) | 1992-04-07 | 1992-04-07 | 微粒子検出装置用の多点入力切換機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04126147U true JPH04126147U (ja) | 1992-11-17 |
JPH0524044Y2 JPH0524044Y2 (en]) | 1993-06-18 |
Family
ID=31913237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2936092U Granted JPH04126147U (ja) | 1992-04-07 | 1992-04-07 | 微粒子検出装置用の多点入力切換機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04126147U (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7538473B2 (en) | 2004-02-03 | 2009-05-26 | S.C. Johnson & Son, Inc. | Drive circuits and methods for ultrasonic piezoelectric actuators |
-
1992
- 1992-04-07 JP JP2936092U patent/JPH04126147U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0524044Y2 (en]) | 1993-06-18 |
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